The University of Southampton
Courses

ELEC6203 Introduction to MEMS

Module Overview

The student will gain a basic understanding of current MicroElectroMechanical Systems (MEMS) technology and industrial instrumentation systems, with particular emphasis on smart sensors and actuators. The course introduces the fundamental of measurement systems and focuses in particular on MEMS fabrication, MEMS transducer types and applications. This is a core module for the MSc MEMS course and is optional for MSc Biodevices, MSc Nanoelectronics and Nanotechnology, and Pt 4 MEng Electronics and Electromechanical courses.

Aims and Objectives

Module Aims

To provide an overview of current MicroElectroMechanical Systems (MEMS) technology and industrial instrumentation systems, with particular emphasis on smart sensors and actuators.

Learning Outcomes

Knowledge and Understanding

Having successfully completed this module, you will be able to demonstrate knowledge and understanding of:

  • The basic principles of measurement systems
  • The principles of some common transducer types, their strengths and weaknesses and their use in MEMS
  • The benefits of MEMS technology in relation to applications
Transferable and Generic Skills

Having successfully completed this module you will be able to:

  • Structure and write a technical report
Subject Specific Practical Skills

Having successfully completed this module you will be able to:

  • Simulate MEMS structures using finite element analysis
Subject Specific Intellectual and Research Skills

Having successfully completed this module you will be able to:

  • Appreciate the scaling effects arising from miniaturising systems
  • Design a MEMS pressure sensor

Syllabus

- Introduction Lecture - Microfabrication - Magnetic Sensors - Piezoresistive MEMS - Pressure Sensors - Thick-film and PiezoMEMS - MEMS Actuators - Resonant sensors - MEMS resonant sensors - Measurement systems - Physical sensors - Modelling the dynamics of sensor systems - Intelligent sensors - Thermal sensors - Charge amplifiers

Learning and Teaching

TypeHours
Completion of assessment task11
Wider reading or practice33
Follow-up work18
Preparation for scheduled sessions18
Lecture36
Tutorial12
Supervised time in studio/workshop12
Revision10
Total study time150

Resources & Reading list

Beeby SP, Ensell GJ, Kraft M and White NM (2004). MEMS Mechanical Sensors. 

Brignell JE and White NM (1996). Intelligent sensor systems revised edition. 

Bentley JP (2005). Principles of measurement systems. 

Assessment

Assessment Strategy

Laboratory sessions are scheduled in the labs on level 2 of the Zepler building Length of each session: 3 hours Number of sessions completed by each student: 3 Max number of students per session: unlimited Demonstrator:student ratio: 1:12 Preferred teaching weeks: 6 to 11

Summative

MethodPercentage contribution
Exam  (2 hours) 70%
Laboratory Report 30%

Referral

MethodPercentage contribution
Exam  (2 hours) 100%

Repeat Information

Repeat type: Internal & External

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