Staff
Research in micro/nano-electromechanical systems (MEMS and NEMS) in our group is primarily focused on the development, characterisation and modelling of novel materials and processes for this emerging class of engineering systems, as well as the development of devices which exploit novel materials and process technologies. To be effective these materials solutions have to be deployed in the context of the overall systems. This requires multidisciplinary research projects involving relevant academic and industrial collaborations. We also have the benefit of state-of-the-art facilities at the newly-commissioned Southampton Nanofabrication Centre.
Research activities focus on MEMS materials, structures and package design, including:
- RF switches, flow control, nanoimprint lithography constitutive law development
- Micromechanical testing of materials for MEMS
- Materials, process and actuator/sensor selection for MEMS
- Development of mechanics framework for wafer bonding (direct bonding, thermocompression and anodic bonding)
- Energy harvesting at micro/nano scale