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The University of Southampton
EngineeringOur research

Nano and micro-electromechanical systems group

MEMS examples

Dr Luidi Jiang

Professor John McBride

Professor Mark Spearing 

Research in micro/nano-electromechanical systems (MEMS and NEMS) in our group is primarily focused on the development, characterisation and modelling of novel materials and processes for this emerging class of engineering systems, as well as the development of devices which exploit novel materials and process technologies.  To be effective these materials solutions have to be deployed in the context of the overall systems.  This requires multidisciplinary research projects involving relevant academic and industrial collaborations.  We also have the benefit of state-of-the-art facilities at the newly-commissioned Southampton Nanofabrication Centre.

Research activities focus on MEMS materials, structures and package design, including:

Our research strengths


Structural materials performance


Surface engineering, corrosion and tribology

Electrochemical engineering

Materials processing

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