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The University of Southampton
Interdisciplinary Research Excellence

Advances in micro-to nanoscale metrology Event

14:00 - 15:00
20 June 2012
Building 53, Room 4025

Event details

The National Physical Laboratory has been active in the field of engineering nanometrology for a number of years

A summary of progress over the last five years is presented and the following research projects discussed in detail:

  1. Development of an infrastructure for the calibration of instruments for measuring areal surface topography, along with the development of a real software measurement standards. This work comprises the use of the optiical transfer function and a technique for the simultaneous measurement of topography and the phase change on reflection, allowing composite materials to be measured.

  2. Development of a vibrating micro-CMM probe with isotropic probing reaction and the ability to operate in a non-contact mode.

  3. A review of x-ray computed tomography and its use in dimensional metrology.

Professor Richard Leach is a Principal Research Scientist at the National Physical Laboratory in the UK and a visiting professor at Loughborough University. He obtained a PhD in Surface Metrology from University of Warwick in 2000. He has been with NPL since 1990 and has current research interests in surface topography measurement, micro-coordinate metrology and computed tomography. Richard is on the Council of euspen, the Board of MANCEF, the IoN Advisory Board and several international standards committees. He has over 150 publications including two textbooks. Richard is a Fellow of the Institute of Physics and the Institute of Nanotechnology.

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