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The University of Southampton
University of Southampton Malaysia

The Selection of Materials and Actuation for Nano- and Micro-Systems Seminar

15:00 - 16:00
25 October 2013
Lecture Theatre Room 1019

For more information regarding this seminar, please telephone Professor Mark Spearing on +44 (0)23 8059 9526 or email .

Event details

An overview of work in several published papers by Professor Mark Spearing on materials and device operating principle selection for microelectromechanical systems (MEMS) as well as including newer work on the selection of processes for micro- and nanofabrication and the optimization of bimaterial actuators at small scales.

 The past 25 years have seen microelectromechanical systems (MEMS) transition from being a research curiosity to a multi-billion dollar commercial enterprise.  At the same time the ratio of commercially successful MEMS to the total of prototype devices created as part of research and development efforts is small.  In large part this low rate of return is because MEMS development, and increasingly Nano-Systems, is still in a highly exploratory phase, where all ideas are considered worth exploring. At the same time the range of materials (and processes) used in commercial MEMS is relatively small and largely derived from the silicon-based microelectronics materials (and process) set.  Given the range of MEMS devices that have been attempted it is possible, and timely to assess the choice of materials, processes and the realized performance of devices as a function of operating principle and also to compare these choices and performance with those for macroscale devices.  


Speaker information

Professor Mark Spearing,is a Professor of Engineering Materials in the Faculty of Engineering and the Environment in the University of Southampton, he is also Pro Vice Chancellor (International) for the University and was previously Head of the School of Engineering Sciences. He received his Ph.D from Cambridge University Engineering Department in 1990, working on the fatigue damage mechanics of carbon fibre composites.

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