Vias must be drawn orthogonal to the grid of the layout. Non-Manhattan vias are not allowed.
| Rule | Description | Lambda | |||||
|---|---|---|---|---|---|---|---|
| 3 Metal Process | 4+ Metal Process | ||||||
| SCMOS | SUBM | DEEP | SCMOS | SUBM | DEEP | ||
| 14.1 | Exact size | 2x2 | 2x2 | n/a | 2x2 | 2x2 | 3x3 |
| 14.2 | Minimum spacing | 3 | 3 | n/a | 3 | 3 | 3 |
| 14.3 | Minimum overlap by metal2 | 1 | 1 | n/a | 1 | 1 | 1 |
| 14.4 | Minimum spacing to via1 for technology codes that do not allow stacked vias (SCNA, SCNE, SCN3M, SCN3ME, SCN3MLC) | 2 | 2 | n/a | 2 | 2 | n/a |
| 14.5 | Via2 may be placed over contact | ||||||
| Rule | Description | Lambda | |||||
| 3 Metal Process | 4+ Metal Process | ||||||
| SCMOS | SUBM | DEEP | SCMOS | SUBM | DEEP | ||
| 15.1 | Minimum width | 6 | 5 | n/a | 3 | 3 | 3 |
| 15.2 | Minimum spacing to metal3 | 4 | 3 | n/a | 3 | 3 | 4 |
| 15.3 | Minimum overlap of via2 | 2 | 2 | n/a | 1 | 1 | 1 |
| 15.4 | Minimum spacing when either metal line is wider than 10 lambda | 8 | 6 | n/a | 6 | 6 | 8 |
