The University of Southampton

ELEC6201 Microfabrication

Module Overview

This module provides an overview of modern microfabrication technologies, and is as such structured around the state-of-the-art facilities in the new Southampton Nanofabrication Centre. The various fabrication techniques that are relevant for microdevices in the field of electronics, optoelectronics and micro-electro-mechanical systems (MEMS) will be addressed in the lectures, with an emphasis on their physical and chemical principles. The integration of these techniques will be explained with an example of a complete process flow for the fabrication of a specific microdevice. The organisation of a fabrication facility, including risk assessment aspects, will be addressed with a cleanroom tour and laboratory-based coursework. This laboratory will take place in the clean room.

Aims and Objectives

Module Aims

To provide an overview of microfabrication methodologies

Learning Outcomes

Knowledge and Understanding

Having successfully completed this module, you will be able to demonstrate knowledge and understanding of:

  • The microfabrication technology for the microsystem devices that are used in modern electronic, optoelectronic and lab-on-a-chip applications
  • Fabrication process flow in a cleanroom environment
Transferable and Generic Skills

Having successfully completed this module you will be able to:

  • Write concise technical/laboratory reports in the format of a journal paper
Subject Specific Practical Skills

Having successfully completed this module you will be able to:

  • Perform some basic microfabrication pattern transfer processes in a cleanroom environment
  • Perform some device characterisation procedures
Subject Specific Intellectual and Research Skills

Having successfully completed this module you will be able to:

  • Appreciate how fabrication process limitations influence device design
  • Design a process flow for electronic/optoelectronic/MEMS microsystem devices


Microfabrication introduction and overview - Material for fabrication - Fabrication equipment - Growth technology - Silicon-based process Fabrication technology - Pattern transfer technology - Lithography – photolithography - Resist technology - Micromachining – wet etch and dry etch - Materials processing technology - Material deposition methods - Basic ion implantation and diffusion doping process - Low and high temperature process - Device packaging methods Characterisation technology for microfabrication process Design criteria and fabrication method for micro device applications Microfabrication process integration only. It is not possible to refer in the same academic year.

Learning and Teaching

Follow-up work12
Completion of assessment task24
Preparation for scheduled sessions12
Wider reading or practice62
Total study time150

Resources & Reading list

Introduction to Microfabrication.

Sze SM (2002). Semiconductor Devices: Physics and Technology. 

A laboratory manual will be provided. 

Franssila S (2010). Introduction to Microfabrication. 

May GS & Sze SM (2004). Fundamentals of Semiconductor Fabrication. 

Sze SM (2013). Semiconductor Devices: Physics and Technology. 

Madou MJ (2012). Fundamentals of Microfabrication and Nanotechnology. 

Comprehensive lecture notes will be provided. 

Madou MJ (2002). Fundamentals of Microfabrication. 

On-line journals. 


Assessment Strategy

The coursework will not be marked if the student has not attended the laboratory sessions.


MethodPercentage contribution
Exam  (2 hours) 70%
Report 30%


MethodPercentage contribution
Exam  (2 hours) 100%

Repeat Information

Repeat type: Internal & External

Linked modules


To study this module, you will need to have studied the following module(s):

ELEC3207Nanoelectronic Devices
Share this module Facebook Google+ Twitter Weibo

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.