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The University of Southampton
ADEPT – Advanced Devices by ElectroPlaTing

Device fabrication

The Southampton Nanofabrication Centre provides state-of-the-art facilities for design and fabrication of nanodevices across the breadth of the ADEPT programme. ADEPT team members will have access to the clean room facilities


Future production of electrically contacted individual devices with feature sizes smaller than those currently produced by top-down techniques will require controlled bottom-up methods. The Damascene process pioneered by IBM and used to electrodeposit copper interconnects on silicon chips has been essential to the progress of VLSI to its current level. This process is fully integrated into microfabrication. Electrodeposition can produce very high purity materials, e.g. epitaxial magnetic films with a quality equal to those prepared by molecular beam epitaxy. Single and multi-component devices can be deposited into track etch structures or anodic alumina membranes with pores >30 nm using water or ionic liquids. However, much of the state of the art in electrodeposition into very small features for nanodevice fabrication lies in our work.

 

Nano Research Group

The nano group is part of Electronics and Computer Science at the University of Southampton

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