The Zeiss EVO SEM is equipped with a Gatan XuM for X-ray computed tomography. This complements the SEM imaging that provides 2D information. For the XCT modality, X-rays are generated by focusing the electron beam onto a metal target, which are transmitted through the sample and captured onto a small detector. Typical applications would be in the life sciences for the analysis and reconstruction of biological specimens. The microscope is hosted at the clean rooms at University of Southampton’s Nanofabrication centre
‣ optimised for 4-12kV operation
‣ selection of targets (bulk and thin), ~200nm resolution capabilities
‣ phase enhanced contrast
‣ 1340x1300 camera
‣ samples 1-2mm and below