Facilities

Learn more about the facilities supporting our research.

Nanofabrication cleanrooms
The Southampton Nanofabrication Centre houses a fully featured suite of semiconductor processing tools up to 200 millimetre wafer scale.

Novel and compound glass facility
We offer specialised glass making using glovebox systems for batching, melting, annealing and casting of glass under dry inert atmosphere.

Hybrid materials and devices facility
We specialise in processing and characterisation of thin film materials from solution, such as those employed in flexible or wearable optoelectronic devices and battery research.

Deep-ultraviolet projection lithography facility
Our deep-ultraviolet scanner is a unique capability within UK academic research. It gives a 248 nanometre (nm) laser source, which gives a critical dimension of 180nm over a 200 millimetre wafer. It has a throughput of 120 wafers per hour.