Research project

Compact imaging system for semiconductor inspection based on metalenses

Staff

Lead researchers

Dr Bruce (Jun-Yu) Ou

Associate Professor
Research interests
  • Metalens for imaging and metrology
  • AI for nanoimaging
  • Nano-optomechanics
Connect with Bruce (Jun-Yu)

Research outputs

Chuang Sun, Hailong Pi, Kian Shen Kiang, Tiberius S. Georgescu, Jun-Yu Ou, Hendrik Ulbricht & Jize Yan, 2024, Nanophotonics
Type: article