Project overview
This proposal seeks funding to acquire a refurbished stepper and associated wafer coater, tools to enable photolithographic patterning of semiconductor wafers for device and circuit fabrication. The stepper will be located at Southampton University in the recently opened £120m cleanroom complex. It will effectively increase the capacity of the cleanroom complex, which will in turn facilitate and underpin a wealth of world class research.
Not only will research at Southampton be enhanced, but Southampton (SOU), Glasgow (GLA), and Surrey (SUR) universities will pool resources to establish a Silicon Photonics Fabrication Capability within the UK, to satisfy an increasing demand for the fabrication of Silicon Photonics devices from the UK’s premier researchers. This will encourage wider usage of world class equipment within the UK, in line with EPSRC policy.
We seek funding for both the equipment and 3.5 RAs across the 3 institutions, over a 4 year period, to establish the Capability. Access to a very significant inventory of additional equipment at these 3 universities will be facilitated.
The project is extremely timely, as silicon foundry services around the world are moving towards a model in which standard platforms and devices will be offered, making it almost impossible for researchers to carry out innovative work at the device level, or in non-standard platforms.
Not only will research at Southampton be enhanced, but Southampton (SOU), Glasgow (GLA), and Surrey (SUR) universities will pool resources to establish a Silicon Photonics Fabrication Capability within the UK, to satisfy an increasing demand for the fabrication of Silicon Photonics devices from the UK’s premier researchers. This will encourage wider usage of world class equipment within the UK, in line with EPSRC policy.
We seek funding for both the equipment and 3.5 RAs across the 3 institutions, over a 4 year period, to establish the Capability. Access to a very significant inventory of additional equipment at these 3 universities will be facilitated.
The project is extremely timely, as silicon foundry services around the world are moving towards a model in which standard platforms and devices will be offered, making it almost impossible for researchers to carry out innovative work at the device level, or in non-standard platforms.
Staff
Lead researcher
Other researchers
Collaborating research institutes, centres and groups
Research outputs
H. Du,
S. Stanković,
D.T. Tran,
G. J. Sharp,
M. Sorel,
, 2019
, Optics Express
, 27 (5) , 7365--7372
DOI: 10.1364/OE.27.007365
Type: article
Tiantian Li,
Nannicha Hattasan,
Wei Cao,
Zhibo Qu,
Jordi Soler Penadés,
Lorenzo Mastronardi,
Vinita Mittal,
Daniel Benedikovic,
Hequan Wu,
Zhiping Zhou,
, 2019
, Photonics Research
, 7 (8) , 828--836
DOI: 10.1364/PRJ.7.000828
Type: article
Senta Lisa Jantzen,
Milan M. Milošević,
, 2019
Type: conference
Katarzyna Grabska,
Andrea Ballabio,
Andrea Barzaghi,
Giovanni Isella,
Shinichi Saito,
, 2019
Type: conference
Yangbo Wu,
Zhibo Qu,
Ahmed Osman,
Wei Cao,
Ali Khokhar,
Jordi Soler Penadés,
, 2019
, ACS Photonics
, 6 (12) , 3253--3260
Type: article