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Microfabrication

When you'll study it
Semester 1
CATS points
15
ECTS points
7.5
Level
Level 7
Module lead
Harold Chong
Academic year
2021-22

Module overview

This module provides an overview of modern microfabrication technologies for the making of micro structures applicable to device engineering.

The various fabrication techniques that are relevant for microdevices in the field of electronics, optoelectronics and micro-electro-mechanical systems (MEMS) will be addressed in the lectures, with an emphasis on their physical, mechanical and chemical principles. The integration of these techniques will be explained with examples of complete process flow for the fabrication of different microdevices. Element of design method to produce microdevices will be introduced.

Linked modules

Pre-requisite: ELEC3207 OR ELEC6259

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