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The University of Southampton
Courses

ELEC6201 Microfabrication

Module Overview

This module provides an overview of modern microfabrication technologies for the making of micro structures applicable to device engineering. The various fabrication techniques that are relevant for microdevices in the field of electronics, optoelectronics and micro-electro-mechanical systems (MEMS) will be addressed in the lectures, with an emphasis on their physical, mechanical and chemical principles. The integration of these techniques will be explained with examples of complete process flow for the fabrication of different microdevices. Element of design method to produce microdevices will be introduced.

Aims and Objectives

Learning Outcomes

Knowledge and Understanding

Having successfully completed this module, you will be able to demonstrate knowledge and understanding of:

  • The microfabrication technology for the microsystem devices that are used in modern electronic, optoelectronic and lab-on-a-chip applications
  • Fabrication process flow in a cleanroom environment
Subject Specific Intellectual and Research Skills

Having successfully completed this module you will be able to:

  • Appreciate how fabrication process limitations influence device design
  • Design a process flow for electronic/optoelectronic/MEMS microsystem devices
Transferable and Generic Skills

Having successfully completed this module you will be able to:

  • Write concise technical/laboratory reports in the format of a journal paper
Subject Specific Practical Skills

Having successfully completed this module you will be able to:

  • Perform device design and characterisation procedures

Syllabus

Microfabrication introduction and overview - Material for fabrication - Fabrication equipment - Growth technology - Silicon-based process Fabrication technology - Pattern transfer technology - Lithography – photolithography - Resist technology - Micromachining – wet etch and dry etch - Materials processing technology - Material deposition methods - Basic ion implantation and diffusion doping process - Low and high temperature process - Device packaging methods Characterisation technology for microfabrication processes Microfabrication process integrations

Learning and Teaching

Teaching and learning methods

Lectures, Tutorials, Lab and Coursework

TypeHours
Completion of assessment task24
Revision10
Lecture24
Follow-up work12
Wider reading or practice62
Preparation for scheduled sessions12
Tutorial6
Total study time150

Resources & Reading list

Introduction to Microfabrication.

Madou MJ (2012). Fundamentals of Microfabrication and Nanotechnology. 

Sze SM (2013). Semiconductor Devices: Physics and Technology. 

Franssila S (2010). Introduction to Microfabrication. 

Madou MJ (2002). Fundamentals of Microfabrication. 

A laboratory manual will be provided. 

On-line journals. 

May GS & Sze SM (2004). Fundamentals of Semiconductor Fabrication. 

Comprehensive lecture notes will be provided. 

Sze SM (2002). Semiconductor Devices: Physics and Technology. 

Assessment

Assessment Strategy

The coursework will not be marked if the student has not attended the laboratory sessions.

Summative

MethodPercentage contribution
Continuous Assessment 30%
Final Assessment  70%

Repeat

MethodPercentage contribution
Set Task 100%

Referral

MethodPercentage contribution
Set Task 100%

Repeat Information

Repeat type: Internal & External

Linked modules

Pre-requisite: ELEC3207 OR ELEC6259

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