The University of Southampton

ELEC6201 Microfabrication

Module Overview

This module provides an overview of modern microfabrication technologies, and is as such structured around the state-of-the-art facilities in the new Southampton Nanofabrication Centre. The various fabrication techniques that are relevant for microdevices in the field of electronics, optoelectronics and micro-electro-mechanical systems (MEMS) will be addressed in the lectures, with an emphasis on their physical and chemical principles. The integration of these techniques will be explained with an example of a complete process flow for the fabrication of a specific microdevice. The organisation of a fabrication facility, including risk assessment aspects, will be addressed with a cleanroom tour and laboratory-based coursework. This laboratory will take place in the clean room.

Aims and Objectives

Module Aims

To provide an understanding of microfabrication technologies for electronic, optoelectronic, electro-mechanical, bio-chemical and sensor devices.

Learning Outcomes

Knowledge and Understanding

Having successfully completed this module, you will be able to demonstrate knowledge and understanding of:

  • The microfabrication technology for the microsystem devices that are used in modern electronic, optoelectronic and lab-on-a-chip applications
  • Fabrication process flow in a cleanroom environment
Subject Specific Intellectual and Research Skills

Having successfully completed this module you will be able to:

  • Appreciate how fabrication process limitations influence device design
  • Design a process flow for electronic/optoelectronic/MEMS microsystem devices
Transferable and Generic Skills

Having successfully completed this module you will be able to:

  • Write concise technical/laboratory reports in the format of a journal paper
Subject Specific Practical Skills

Having successfully completed this module you will be able to:

  • Perform some basic microfabrication pattern transfer processes in a cleanroom environment
  • Perform some device characterisation procedures


Microfabrication introduction and overview - Material for fabrication - Fabrication equipment - Growth technology - Silicon-based process Fabrication technology - Pattern transfer technology - Lithography – photolithography - Resist technology - Micromachining – wet etch and dry etch - Materials processing technology - Material deposition methods - Basic ion implantation and diffusion doping process - Low and high temperature process - Device packaging methods Characterisation technology for microfabrication process Design criteria and fabrication method for micro device applications Microfabrication process integration only. It is not possible to refer in the same academic year.

Learning and Teaching

Teaching and learning methods

Lectures, Tutorials, Lab and Coursework

Follow-up work12
Wider reading or practice62
Preparation for scheduled sessions12
Completion of assessment task24
Total study time150

Resources & Reading list

A laboratory manual will be provided. 

Sze SM (2002). Semiconductor Devices: Physics and Technology. 

Comprehensive lecture notes will be provided. 

On-line journals. 

Franssila S (2010). Introduction to Microfabrication. 

Sze SM (2013). Semiconductor Devices: Physics and Technology. 

Madou MJ (2002). Fundamentals of Microfabrication. 

Madou MJ (2012). Fundamentals of Microfabrication and Nanotechnology. 

Introduction to Microfabrication.

May GS & Sze SM (2004). Fundamentals of Semiconductor Fabrication. 


Assessment Strategy

The coursework will not be marked if the student has not attended the laboratory sessions.


MethodPercentage contribution
Examination  (2 hours) 70%
Report 30%


MethodPercentage contribution
Examination  (2 hours) 100%

Repeat Information

Repeat type: Internal & External

Linked modules

Pre-requisite: ELEC3207 OR COMP6238

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