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The University of Southampton

ELEC6201 Microfabrication

Module Overview

This module provides an overview of modern microfabrication technologies for the making of micro structures applicable to device engineering. The various fabrication techniques that are relevant for microdevices in the field of electronics, optoelectronics and micro-electro-mechanical systems (MEMS) will be addressed in the lectures, with an emphasis on their physical, mechanical and chemical principles. The integration of these techniques will be explained with examples of complete process flow for the fabrication of different microdevices. Element of design method to produce microdevices will be introduced.

Aims and Objectives

Learning Outcomes

Knowledge and Understanding

Having successfully completed this module, you will be able to demonstrate knowledge and understanding of:

  • The microfabrication technology for the microsystem devices that are used in modern electronic, optoelectronic and lab-on-a-chip applications
  • Fabrication process flow in a cleanroom environment
Subject Specific Intellectual and Research Skills

Having successfully completed this module you will be able to:

  • Appreciate how fabrication process limitations influence device design
  • Design a process flow for electronic/optoelectronic/MEMS microsystem devices
Transferable and Generic Skills

Having successfully completed this module you will be able to:

  • Write concise technical/laboratory reports in the format of a journal paper
Subject Specific Practical Skills

Having successfully completed this module you will be able to:

  • Perform device design and characterisation procedures


Microfabrication introduction and overview - Material for fabrication - Fabrication equipment - Growth technology - Silicon-based process Fabrication technology - Pattern transfer technology - Lithography – photolithography - Resist technology - Micromachining – wet etch and dry etch - Materials processing technology - Material deposition methods - Basic ion implantation and diffusion doping process - Low and high temperature process - Device packaging methods Characterisation technology for microfabrication processes Microfabrication process integrations

Learning and Teaching

Teaching and learning methods

Lectures, Tutorials, Lab and Coursework

Preparation for scheduled sessions12
Follow-up work12
Completion of assessment task24
Wider reading or practice62
Total study time150

Resources & Reading list

Franssila S (2010). Introduction to Microfabrication. 

On-line journals. 

May GS & Sze SM (2004). Fundamentals of Semiconductor Fabrication. 

Madou MJ (2012). Fundamentals of Microfabrication and Nanotechnology. 

Introduction to Microfabrication.

Madou MJ (2002). Fundamentals of Microfabrication. 

Sze SM (2002). Semiconductor Devices: Physics and Technology. 

Comprehensive lecture notes will be provided. 

Sze SM (2013). Semiconductor Devices: Physics and Technology. 

A laboratory manual will be provided. 


Assessment Strategy

The coursework will not be marked if the student has not attended the laboratory sessions.


MethodPercentage contribution
Coursework 30%
Examination  (2 hours) 70%


MethodPercentage contribution
Examination 100%


MethodPercentage contribution
Examination  (2 hours) 100%

Repeat Information

Repeat type: Internal & External

Linked modules

Pre-requisite: ELEC3207 OR ELEC6259

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