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The University of Southampton

Research project: MEMS components formed from nanostructural metals - Dormant - Dormant

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Equal channel angular pressing (ECAP) is the most well-known processing method amongst the group of severe plastic deformation (SPD) models.  In the ECAP process, conventional microstructures of the materials are changed to nanostructured ones.

A promising, but as yet unexplored application is to use microelectromechanical systems (MEMS) for this, which provide the advantages of small size, low cost and high functionality.  This project focuses on applying ultra-fine grained (UFG) aluminium alloys produced by ECAP to the microelectromechanical system (MEMS).  We will look at selection of materials, fabrication of UFG materials by ECAP, microfabrication of MEMS components using UFG materials, and design and setup of all the facilities. 

Conferences and events associated with this project:

The ECAP process
The ECAP process
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