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Advanced Composite Materials Facility

Discovery, optimization and manufacture of 2-D Chalcogenides

A low temperature (350°C) synthesis of high quality 2-D MoS2 (single or multilayer) using ePVD has been demonstrated, and has applications both in combinatorial discovery of new 2-D mixed sulphides, or in device manufacture on up to 300mm wafer. These layers can be directly synthesized on amorphous or polycrystalline surfaces, providing a key step in any future CMOS process.

 

Figure 1:MoS2 thin film false colour image of thickness dependence.
Figure 1:MoS2 thin film false colour image of thickness dependence.

COMBINATORIAL SYNTHESIS

A false colour image showing the thickness dependence (measured by AFM) of a MoS2 thin film masked in an array of 14x14 1mm fields using the duel shutter method: Thicknesses range from 0.5nm – 13nm (ca. 1-20ML).

The quality and thickness of layers has been fully characterized by Raman Spectroscopy, Photoluminescence, AFM and XRD. High throughput screening methodologies allowing optimizing of electrical devices such as FETS is underway. (Brian E. Hayden, Dan Hewak and Jin Yao to be published (2020)).

 

 

 

Figure 2:196 fabricated FET devices.
Figure 2:196 fabricated FET devices.

A photograph which shows the array of 196 fabricated FET devices on a substrate, together with an SEM of one of the device structures. Combinatorial synthetic methods allow a variation in composition or thickness of 2-D materials over the array.

 

References:

1)Morgan, K., Tang, T., Zeimpekis, I., Ravagli, A., Craig, C., Yao, J., ... Hewak, D. (2019). High-throughput physical vapour deposition flexible thermoelectric generators. Scientific Reports, 9, 1-9. [4393].


2)Piccinotti, D., Gholipour, B., Yao, J., MacDonald, K. F., Hayden, B. E., & Zheludev, N. I. (2019). Stoichiometric engineering of chalcogenide semiconductor alloys for nanophotonic applications. Advanced Materials, 31(14), [1807083].


3)Huang, Y., Bazarnik, P., Wan, D., Luo, D., Rodrigues Pereira, P. H., Lewandowska, M., ... Langdon, T. (2019). The fabrication of graphene-reinforced Al-based nanocomposites using high-pressure torsion. Acta Materialia, 164, 499-511. DOI: 10.1016/j.actamat.2018.10.060


4)Piccinotti, D., Gholipour, B., Yao, J., MacDonald, K. F., Hayden, B., & Zheludev, N. (2018). Compositionally controlled plasmonics in amorphous semiconductor metasurfaces. Optics Express, 26(16), 20861-20867.


5) Piccinotti, D., Gholipour, B., Yao, J., MacDonald, K. F., Hayden, B., & Zheludev, N. (2018). Optical response of nanohole arrays filled with chalcogenide low-epsilon media. Advanced Optical Materials, 6(22), [1800395]. DOI: 10.1002/adom.201800395

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