Our facilities The Zepler Cleanrooms complex includes a variety of facilities and laboratories for materials and device research in electronics, photonics and nanotechnology. Nanofabrication cleanrooms The Southampton Nanofabrication Centre houses a fully featured suite of semiconductor processing tools up to 200 millimetre wafer scale. Deep-ultraviolet projection lithography facility Our deep-ultraviolet scanner is a unique capability within UK academic research. It gives a 248 nanometre (nm) laser source, which gives a critical dimension of 180nm over a 200 millimetre wafer. It has a throughput of 120 wafers per hour. Electron beam lithography facility Our electron beam lithography facility creates new opportunities for fine-geometry capability in novel device fabrication, across electronics, photonics, and bio-nano technology. Focused ion beam facility We specialise in rapid nanostructuring of materials and devices, from nanomembranes to semiconductor multilayer structures and optical fibres for nanophotonics, electronics, metamaterials and plasmonics research. Silica fibre facility We specialise in the manufacture and research of doped and structured fibres. Novel and compound glass facility We offer specialised glass making using glovebox systems for batching, melting, annealing and casting of glass under dry inert atmosphere. Flame hydrolysis deposition facility We deposit optical fibre grade glass on silicon wafers, from 1 to 100 micrometres thickness. Hybrid materials and devices facility We specialise in processing and characterisation of thin film materials from solution, such as those employed in flexible or wearable optoelectronic devices and battery research.
