The University of Southampton
Courses

ELEC6208 MEMS Sensors and Actuators

Module Overview

The aim of this module is to provide an overview of the emerging Micro-system-technology (MST) and its applications. Students will gain an insight in the design of MST micro-electro-mechanical systems (MEMS) and an understanding of the physics of different sensing and actuation mechanisms. They will become familiar with the technicalities of the most important examples of MST devices and will be prepared for this key technology. The basic knowledge on MST/MEMS taught in ELEC6203 Introduction to MEMS is pre-requisite.

Aims and Objectives

Module Aims

The aim of this module is to provide an overview of the emerging Micro-system-technology (MST) and its applications.

Learning Outcomes

Knowledge and Understanding

Having successfully completed this module, you will be able to demonstrate knowledge and understanding of:

  • Key features of MEMS sensors, actuators and interface circuits, including state-of-the-art RF applications
  • MEMS device characterisation
Transferable and Generic Skills

Having successfully completed this module you will be able to:

  • Critically evaluate new technologies and present information in a concise report
Subject Specific Practical Skills

Having successfully completed this module you will be able to:

  • Use industry-standard software to simulate sensor interfacing circuits
  • Use standard methods to characterise basic MEMS devices
Subject Specific Intellectual and Research Skills

Having successfully completed this module you will be able to:

  • Design and model a typical MEMS sensor
  • Design and simulate interfaces for MEMS sensors and actuators

Syllabus

Sensing and Actuation - Introduction - Piezoresistive and Capacitive sensing - Electrostatic actuation - Pressure sensors - Accelerometers - Gyroscopes Interfacing with Sensors and Actuators - Bridge circuits - Amplifiers (inc. transimpedance) - Closed-loop control of systems - Filtering and signal conditioning RF MEMS - Tunable capacitors - Inductors on chip - Resonators - Mechanical filters - MEMS for mobile phones on-a-chip Laboratory - Modelling and characterisation of MEMS cantilever/beam

Learning and Teaching

TypeHours
Lecture18
Completion of assessment task66
Tutorial5
Follow-up work9
Wider reading or practice43
Preparation for scheduled sessions9
Total study time150

Resources & Reading list

Beeby, S., Ensell, G., Kraft, W. and White, N., (2004). MEMS Mechanical Sensors. 

Comprehensive lecture notes will be provided. 

IEEE/ASME Journal of Microelectromechanical Systems, Sensors and Actuators. 

Senturia, S.D (2001). Microsystem Design. 

Maluf, N. (2000). An Introduction to Microelectromechanical Systems Engineering. 

Kovacs, G.T.A (1998). Micromachined Transducers Sourcebook. 

Kaajakari V (2009). Practical MEMS,. 

Gaura, E (2006). Smart MEMS and Sensor Systems. 

Hector de Los Santos (2004). Introduction to Microelectromechanical Microwave Systems. 

Stepan Lucyszyn Ed. (2010). Advanced RF MEMS. 

Assessment

Assessment Strategy

The lab report will not be marked if the student has not attended the MEMS characterisation lab sessions. Laboratory sessions are scheduled in the labs on level 2 of the Zepler building Length of each session: 3 hours Number of sessions completed by each student: 1 Max number of students per session: unlimited Demonstrator:student ratio: 1:12 Preferred teaching weeks: 8

Summative

MethodPercentage contribution
Interfacing with Sensors and Actuators 25%
Laboratory Report 25%
RF MEMS 25%
Sensing and Actuation 25%

Referral

MethodPercentage contribution
Coursework assignment(s) 100%

Repeat Information

Repeat type: Internal & External

Linked modules

Pre-requisite: ELEC6203

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