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ELEC6208 MEMS Sensors and Actuators

Module Overview

The aim of this module is to provide an overview of the emerging Micro-system-technology (MST) and its applications. Students will gain an insight in the design of MST micro-electro-mechanical systems (MEMS) and an understanding of the physics of different sensing and actuation mechanisms. They will become familiar with the technicalities of the most important examples of MST devices and will be prepared for this key technology. The basic knowledge on MST/MEMS taught in ELEC6203 Introduction to MEMS is pre-requisite.

Aims and Objectives

Module Aims

The aim of this module is to provide an overview of the emerging Micro-system-technology (MST) and its applications.

Learning Outcomes

Knowledge and Understanding

Having successfully completed this module, you will be able to demonstrate knowledge and understanding of:

  • Key features of MEMS sensors, actuators and interface circuits, including state-of-the-art RF applications
  • MEMS device characterisation
Transferable and Generic Skills

Having successfully completed this module you will be able to:

  • Critically evaluate new technologies and present information in a concise report
Subject Specific Practical Skills

Having successfully completed this module you will be able to:

  • Use industry-standard software to simulate sensor interfacing circuits
  • Use standard methods to characterise basic MEMS devices
Subject Specific Intellectual and Research Skills

Having successfully completed this module you will be able to:

  • Design and model a typical MEMS sensor
  • Design and simulate interfaces for MEMS sensors and actuators

Syllabus

- Introduction Lecture - Microfabrication - Magnetic Sensors - Piezoresistive MEMS - Pressure Sensors - Thick-film and PiezoMEMS - MEMS Actuators - Resonant sensors - MEMS resonant sensors - Measurement systems - Physical sensors - Modelling the dynamics of sensor systems - Intelligent sensors - Thermal sensors - Charge amplifiers

Learning and Teaching

TypeHours
Completion of assessment task66
Preparation for scheduled sessions9
Lecture18
Wider reading or practice43
Tutorial5
Follow-up work9
Total study time150

Resources & Reading list

Stepan Lucyszyn Ed. (2010). Advanced RF MEMS. 

Hector de Los Santos (2004). Introduction to Microelectromechanical Microwave Systems. 

IEEE/ASME Journal of Microelectromechanical Systems, Sensors and Actuators. 

Kovacs, G.T.A (1998). Micromachined Transducers Sourcebook. 

Gaura, E (2006). Smart MEMS and Sensor Systems. 

Senturia, S.D (2001). Microsystem Design. 

Kaajakari V (2009). Practical MEMS,. 

Beeby, S., Ensell, G., Kraft, W. and White, N., (2004). MEMS Mechanical Sensors. 

Comprehensive lecture notes will be provided. 

Maluf, N. (2000). An Introduction to Microelectromechanical Systems Engineering. 

Assessment

Assessment Strategy

The lab report will not be marked if the student has not attended the MEMS characterisation lab sessions. Laboratory sessions are scheduled in the labs on level 2 of the Zepler building Length of each session: 3 hours Number of sessions completed by each student: 1 Max number of students per session: unlimited Demonstrator:student ratio: 1:12 Preferred teaching weeks: 8

Summative

MethodPercentage contribution
Interfacing with Sensors and Actuators 25%
Laboratory Report 25%
RF MEMS 25%
Sensing and Actuation 25%

Referral

MethodPercentage contribution
Coursework assignment(s) 100%

Repeat Information

Repeat type: Internal & External

Linked modules

Co-requisites

To study this module, you will need to also study the following module(s):

CodeModule
ELEC6203Introduction to MEMS
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