Module overview
Linked modules
Pre-requisite: ELEC3207 OR ELEC6259
Aims and Objectives
Learning Outcomes
Subject Specific Intellectual and Research Skills
Having successfully completed this module you will be able to:
- Design a process flow for micro devices such as electronics, optoelectronics, sensors, and MEMS
- Appreciate how fabrication process limitations influence device design
Transferable and Generic Skills
Having successfully completed this module you will be able to:
- Write concise technical/laboratory reports in the format of a journal paper
Knowledge and Understanding
Having successfully completed this module, you will be able to demonstrate knowledge and understanding of:
- Fabrication process flow of creating micro devices in a cleanroom environment
- The microfabrication technology for the microsystem devices that are used in modern electronic, optoelectronic and lab-on-a-chip applications
Subject Specific Practical Skills
Having successfully completed this module you will be able to:
- Perform device fabrication process design and characterisation procedures
Syllabus
Learning and Teaching
Teaching and learning methods
| Type | Hours |
|---|---|
| Revision | 10 |
| Tutorial | 6 |
| Completion of assessment task | 24 |
| Lecture | 24 |
| Wider reading or practice | 62 |
| Preparation for scheduled sessions | 12 |
| Follow-up work | 12 |
| Total study time | 150 |
Resources & Reading list
General Resources
A laboratory manual will be provided.
Comprehensive lecture notes will be provided.
Internet Resources
Introduction to Microfabrication.
Textbooks
Sze SM (2002). Semiconductor Devices: Physics and Technology.
Madou MJ (2012). Fundamentals of Microfabrication and Nanotechnology. CRC Press.
Sze SM (2013). Semiconductor Devices: Physics and Technology. international student version, Wiley.
Madou MJ (2002). Fundamentals of Microfabrication. CRC Press.
May GS & Sze SM (2004). Fundamentals of Semiconductor Fabrication. Wiley.
Franssila S (2010). Introduction to Microfabrication. Wiley.
On-line journals.
Assessment
Assessment strategy
The coursework will not be marked if the student has not attended the laboratory sessions.Summative
This is how we’ll formally assess what you have learned in this module.
| Method | Percentage contribution |
|---|---|
| Exam | 70% |
| A lab report | 30% |
Referral
This is how we’ll assess you if you don’t meet the criteria to pass this module.
| Method | Percentage contribution |
|---|---|
| Exam | 100% |
Repeat
An internal repeat is where you take all of your modules again, including any you passed. An external repeat is where you only re-take the modules you failed.
| Method | Percentage contribution |
|---|---|
| Exam | 100% |
Repeat Information
Repeat type: Internal & External